Plastic masters—rigid templates for soft lithography
نویسندگان
چکیده
منابع مشابه
Plastic masters-rigid templates for soft lithography.
We demonstrate a simple process for the fabrication of rigid plastic master molds for soft lithography directly from (poly)dimethysiloxane devices. Plastics masters (PMs) provide a cost-effective alternative to silicon-based masters and can be easily replicated without the need for cleanroom facilities. We have successfully demonstrated the use of plastics micromolding to generate both single a...
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We report a simple fast, practical and effective method for the replication of the complex venation patterns of natural leaves into PDMSwith accuracy down to a lateral size of 500 nm. Optimising the amount of crosslinker enabled the replication and sealing of the microvascular structures to yield enclosed microfluidic networks. The use of plant leaves as templates for soft lithography was demon...
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Soft lithography has provided a low-expertise route toward micro/nanofabrication and is playing an important role in microfluidics, ranging from simple channel fabrication to the creation of micropatterns onto a surface or within a microfluidic channel. In this review, the materials, methods, and applications of soft lithography for microfluidics are briefly summarized with a particular emphasi...
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Diamond like carbon (DLC) films were deposited on Si and then patterned to form 40 nm features as nanoimprint templates. A plasma enhanced chemical vapor deposition (PECVD) system with CH4 precursor was used to deposit DLC films on Si and quartz substrates. These films were then characterized using Raman spectroscopy, atomic force microscopy (AFM), nanoindentation, and contact angle measurement...
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The interaction between resist and template during the separation process after nanoimprint lithography (NIL) can cause the formation of defects and damage to the templates and resist patterns. To alleviate these problems, fluorinated self-assembled monolayers (F-SAMs, i.e. tridecafluoro-1,1,2,2,tetrahydrooctyl trichlorosilane or FDTS) have been employed as template release coatings. However, w...
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ژورنال
عنوان ژورنال: Lab on a Chip
سال: 2009
ISSN: 1473-0197,1473-0189
DOI: 10.1039/b822081f